2001 Microelectromechanical Systems Conference : MEMS 2001 : 24-26 August 2001 Berkeley, California, USA /

Bibliographic Details
Corporate Authors:	Microelectromechanical Systems Conference Berkeley, California, IEEE Circuits and Systems Society
Format:	Conference Proceeding Book
Language:	English
Published:	Piscataway NJ : Institute of Electrical and Electronics Engineers, [2002]
Subjects:	Microelectromechanical systems > Congresses.

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