APA (7th ed.) Citation

Microelectromechanical Systems Conference Berkeley, California, & IEEE Circuits and Systems Society. (2002). 2001 Microelectromechanical Systems Conference: MEMS 2001 : 24-26 August 2001 Berkeley, California, USA. Institute of Electrical and Electronics Engineers.

Chicago Style (17th ed.) Citation

Microelectromechanical Systems Conference Berkeley, California, and IEEE Circuits and Systems Society. 2001 Microelectromechanical Systems Conference: MEMS 2001 : 24-26 August 2001 Berkeley, California, USA. Piscataway NJ: Institute of Electrical and Electronics Engineers, 2002.

MLA (9th ed.) Citation

Microelectromechanical Systems Conference Berkeley, California, and IEEE Circuits and Systems Society. 2001 Microelectromechanical Systems Conference: MEMS 2001 : 24-26 August 2001 Berkeley, California, USA. Institute of Electrical and Electronics Engineers, 2002.