Cover Image

Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Knystautas, Emile J., Kirk, Wiley P., Browning, Valerie
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4468.
Subjects:
Thin films > Congresses.
Thin films > Effect of radiation on > Congresses.
Ion bombardment > Industrial applications > Congresses.
Molecular electronics > Congresses.
Description
Physical Description:ix, 192 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819441821