Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Knystautas, Emile J., Kirk, Wiley P., Browning, Valerie
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4468.
Subjects:	Thin films > Congresses. Thin films > Effect of radiation on > Congresses. Ion bombardment > Industrial applications > Congresses. Molecular electronics > Congresses.

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