Cover Image

Fabrication of silicon microprobes for optical near-field applications /

Bibliographic Details
Main Author: Minh, Phan Ngoc
Other Authors: Takahito, Ono, Esashi, Masayoshi, 1949-
Format: Book
Language:English
Published: Boca Raton : CRC Press, [2002]
Subjects:
Micromachining.
Silicon.
Near-field microscopy.
Microprobe analysis.
Description
Physical Description:180 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0849311543 (alk. paper)