Fabrication of silicon microprobes for optical near-field applications /

Bibliographic Details

Main Author:	Minh, Phan Ngoc
Other Authors:	Takahito, Ono, Esashi, Masayoshi, 1949-
Format:	Book
Language:	English
Published:	Boca Raton : CRC Press, [2002]
Subjects:	Micromachining. Silicon. Near-field microscopy. Microprobe analysis.