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MEMS and NEMS : systems, devices, and structures /

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Bibliographic Details
Main Author: Lyshevski, Sergey Edward
Format: Book
Language:English
Published: Boca Raton, Fla. : CRC Press, [2002]
Series:Nano- and microscience, engineering, technology, and medicine series.
Subjects:
Microelectromechanical systems.
Description
Physical Description:461 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0849312620 (alk. paper)