MEMS and NEMS : systems, devices, and structures /

Bibliographic Details

Main Author:	Lyshevski, Sergey Edward
Format:	Book
Language:	English
Published:	Boca Raton, Fla. : CRC Press, [2002]
Series:	Nano- and microscience, engineering, technology, and medicine series.
Subjects:	Microelectromechanical systems.