Lyshevski, S. E. (2002). MEMS and NEMS: Systems, devices, and structures. CRC Press.
Chicago Style (17th ed.) CitationLyshevski, Sergey Edward. MEMS and NEMS: Systems, Devices, and Structures. Boca Raton, Fla.: CRC Press, 2002.
MLA (9th ed.) CitationLyshevski, Sergey Edward. MEMS and NEMS: Systems, Devices, and Structures. CRC Press, 2002.
Warning: These citations may not always be 100% accurate.