Cover Image

Materials science in semiconductor processing.

Bibliographic Details
Previous Title:Solid-state electronics (Online)
Uniform Title:Materials science in semiconductor processing (Online)
Corporate Authors: Pergamon Press, Inc, ScienceDirect (Online service)
Format: Journal
Language:English
Published: Oxford, New York : Pergamon.
Subjects:
Semiconductors > Periodicals.
Integrated circuits > Materials > Periodicals.
Electronic journals.
Online Availability: Check for online availability
Description
Item Description:Title from ScienceDirect journal title list (viewed Oct. 27, 2000).
Electronic resource.
Physical Description:Online version of print title: Materials science in semiconductor processing.
Publication Frequency:Quarterly
Format:Mode of access: Internet.
ISSN:1369-8001
Access:Available to subscribers only.