Materials science in semiconductor processing.

Bibliographic Details
Previous Title:	Solid-state electronics (Online)
Uniform Title:	Materials science in semiconductor processing (Online)
Corporate Authors:	Pergamon Press, Inc, ScienceDirect (Online service)
Format:	Journal
Language:	English
Published:	Oxford, New York : Pergamon.
Subjects:	Semiconductors > Periodicals. Integrated circuits > Materials > Periodicals. Electronic journals.
Online Availability:

Available Online