Smart structures and materials 2001. Smart electronics and MEMS : 5-7 March 2001, Newport Beach, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, American Society of Mechanical Engineers, Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio)
Other Authors:	Varadan, V. K., 1943-
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4334.
Subjects:	Microelectronics > Materials > Congresses. Smart materials > Congresses. Microelectromechanical systems > Congresses. Actuators > Congresses.

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