Bibliographic Details
| Corporate Authors: |
Micromachining and Microfabrication Process Technology and Devices Conference Nanjing, Jiangsu Sheng, China,
Society of Photo-optical Instrumentation Engineers,
Dong nan da xue,
China Optics & Optoelectronic Manufacturers Association,
Zhongguo dian zi xue hui,
Laser and Optical Engineering Society (Jiangsu Sheng, China) |
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| Other Authors: |
Tien, Norman C.,
Huang, Qing-An |
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| Format: | Conference Proceeding
Book
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| Language: | English |
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| Published: |
Bellingham, Washington :
SPIE,
[2001]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 4601.
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| Subjects: | |
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