MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, United States. Defense Advanced Research Projects Agency, Semiconductor Equipment and Materials International
Other Authors:	Helvajian, Henry, Janson, Siegfried W., Lärmer, Franz
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4559.
Subjects:	Microelectromechanical systems > Design and construction > Congresses. Microelectromechanical systems > Industrial applications > Congresses. Manufacturing processes > Congresses.

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