Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Francisco, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors:	Ramesham, Rajeshuni
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4558.
Subjects:	Microelectromechanical systems > Reliability > Congresses. Microelectromechanical systems > Testing > Congresses.

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