Surface scattering and diffraction for advanced metrology : 1 August 2001, San Diego, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Gu, Zu-Han, Maradudin, Alexei A., 1931-
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4447.
Subjects:	Surface roughness > Measurement > Congresses. Diffractive scattering > Congresses. Optical measurements > Congresses. Scattering (Physics) > Congresses. Metrology > Congresses.

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