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Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications /

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Bibliographic Details
Other Authors: Seshan, Krishna
Format: Book
Language:English
Published: Norwich, N.Y. : Noyes Publications/William Andrew Pub., [2002]
Edition:2nd ed.
Series:Materials science and process technology series. Electronic materials and process technology.
Subjects:
Thin film devices > Design and construction > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.
Chemical vapor deposition > Handbooks, manuals, etc.
Description
Physical Description:xxviii, 629 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0815514425