Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications /

Bibliographic Details
Other Authors:	Seshan, Krishna
Format:	Book
Language:	English
Published:	Norwich, N.Y. : Noyes Publications/William Andrew Pub., [2002]
Edition:	2nd ed.
Series:	Materials science and process technology series. Electronic materials and process technology.
Subjects:	Thin film devices > Design and construction > Handbooks, manuals, etc. Thin films > Handbooks, manuals, etc. Chemical vapor deposition > Handbooks, manuals, etc.

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