Cover Image

Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: Karam, Jean-Michel, Yasaitis, John
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4557.
Subjects:
Micromachining > Congresses.
Microfabrication > Congresses.
Electromechanical devices > Design and construction > Congresses.
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/4557.toc
Description
Physical Description:x, 486 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819442852