Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors:	Karam, Jean-Michel, Yasaitis, John
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4557.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/4557.toc

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