APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Karam, J., & Yasaitis, J. (2001). Micromachining and microfabrication process technology VII: 22-24 October, 2001, San Francisco, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Jean-Michel Karam, and John Yasaitis. Micromachining and Microfabrication Process Technology VII: 22-24 October, 2001, San Francisco, USA. Bellingham, Washington: SPIE, 2001.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Micromachining and Microfabrication Process Technology VII: 22-24 October, 2001, San Francisco, USA. SPIE, 2001.