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Scanning probe lithography /

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Bibliographic Details
Main Author: Soh, Hyongsok T.
Other Authors: Guarini, Kathryn Wilder, Quate, Calvin F., 1923-
Format: Book
Language:English
Published: Boston : Kluwer Academic Publishers, [2001]
Series:Microsystems (Series)
Subjects:
Integrated circuits > Design and construction.
Microlithography.
Scanning probe microscopy.
Description
Physical Description:xxiii, 195 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0792373618