Scanning probe lithography /

Bibliographic Details
Main Author:	Soh, Hyongsok T.
Other Authors:	Guarini, Kathryn Wilder, Quate, Calvin F., 1923-
Format:	Book
Language:	English
Published:	Boston : Kluwer Academic Publishers, [2001]
Series:	Microsystems (Series)
Subjects:	Integrated circuits > Design and construction. Microlithography. Scanning probe microscopy.

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