MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK /
| Corporate Authors: | , , , |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[2001]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 4407. |
| Subjects: | |
| Online Access: | https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/4407.toc?SSO=1 |
Internet
https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/4407.toc?SSO=1Remote Storage
| Call Number: |
TK7875 .M462 2001 |
|
|---|---|---|
| Call Number | Status | Get It |
| TK7875 .M462 2001 | Available | |