MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Scottish Enterprise, European Optical Society, Institution of Electrical Engineers
Other Authors:	Behringer, Uwe F. W., Uttamchandani, Deepak
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4407.
Subjects:	Microelectromechanical systems > Design and construction > Congresses. Microfabrication > Congresses. Microelectronic packaging > Congresses. Mechatronics > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/4407.toc?SSO=1

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