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IEEE International Symposium on Semiconductor Manufacturing conference proceedings.

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Bibliographic Details
New Title:International Symposium on Semiconductor Manufacturing. International Symposium on Semiconductor Manufacturing
Previous Title:International Symposium on Semiconductor Manufacturing Proceedings
Corporate Authors: International Symposium on Semiconductor Manufacturing, IEEE Electron Devices Society, Ultra Clean Society, Semiconductor Equipment and Materials International, Components, Packaging & Manufacturing Technology Society
Format: Conference Proceeding
Language:English
Published: Piscataway, N.J. : Institute of Electrical and Electronics Engineers, [1997-]
Subjects:
Semiconductors > Design and construction > Congresses.
Semiconductor industry > Production control > Congresses.
Semiconductor industry > Management > Congresses.
Process control > Congresses.
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Description
Published:1997-
Physical Description:volumes : illustrations ; 28 cm.
Publication Frequency:Annual, 1999-
ISSN:1523-553X