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IEEE International Symposium on Semiconductor Manufacturing conference proceedings.

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Bibliographic Details
New Title:International Symposium on Semiconductor Manufacturing. International Symposium on Semiconductor Manufacturing
Previous Title:International Symposium on Semiconductor Manufacturing Proceedings
Corporate Authors: International Symposium on Semiconductor Manufacturing, IEEE Electron Devices Society, Ultra Clean Society, Semiconductor Equipment and Materials International, Components, Packaging & Manufacturing Technology Society
Format: Conference Proceeding
Language:English
Published: Piscataway, N.J. : Institute of Electrical and Electronics Engineers, [1997-]
Subjects:
Semiconductors > Design and construction > Congresses.
Semiconductor industry > Production control > Congresses.
Semiconductor industry > Management > Congresses.
Process control > Congresses.
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Remote Storage

Holdings details from Remote Storage
Call Number: TK7871.85 .I26
Notes: Subscription converted to electronic format.
Library Owns: TK7871.85 .I26 (1999-2001,2003)
Call Number Status Get It
TK7871.85 .I26 2000 Available
TK7871.85 .I26 2001 Available
TK7871.85 .I26 2003 Available
TK7871.85 .I26 1999 Available