Plasma processing of materials : scientific opportunities and technological challenges /

Bibliographic Details
Corporate Authors:	National Research Council (U.S.). Panel on Plasma Processing of Materials, NetLibrary, Inc
Format:	eBook
Language:	English
Published:	Washington, D.C. : National Academy Press, 1991.
Subjects:	Plasma engineering. Microelectronics > Materials > Effect of radiation on. Surfaces (Technology) Electronic books.
Online Access:	Connect to the full text of this electronic book

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