MARC

Tag First Indicator Second Indicator Subfields
LEADER 00000cam a2200000 a 4500
001 in00001620005
005 20151023053537.0
008 001229s2000 wau 101 0 eng d
020 |a 0819438340 
035 |a (OCoLC)ocm45635003 
040 |a CUS  |c CUS  |d TXA  |d UtOrBLW 
049 |a TXAM 
090 |a TK7874  |b .M5324 2000 
245 0 0 |a MOEMS and miniaturized systems :  |b 18-20 September 2000, Santa Clara, USA /  |c M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA). 
246 3 |a Microoptoelectromechanical systems and miniaturized systems 
264 1 |a Bellingham, Wash., USA :  |b SPIE,  |c [2000] 
264 4 |c ©2000 
300 |a viii, 412 pages :  |b illustrations (some color) ;  |c 28 cm. 
336 |a text  |b txt  |2 rdacontent 
337 |a unmediated  |b n  |2 rdamedia 
338 |a volume  |b nc  |2 rdacarrier 
490 1 |a Proceedings / SPIE--the international society for optical engineering ;  |v v. 4178 
504 |a Includes bibliographical references and index. 
650 0 |a Microelectromechanical systems  |v Congresses. 
650 0 |a Miniature electronic equipment  |v Congresses. 
650 0 |a Micromechanics  |v Congresses. 
650 0 |a Optical scanners  |v Congresses. 
700 1 |a Motamedi, M. Edward. 
700 1 |a Göring, Rolf. 
710 2 |a Society of Photo-optical Instrumentation Engineers. 
710 2 |a Semiconductor Equipment and Materials International. 
710 2 |a Solid State Technology (Organization) 
710 2 |a Sandia National Laboratories. 
830 0 |a Proceedings of SPIE--the International Society for Optical Engineering ;  |v v. 4178. 
948 |a cataloged  |b h  |c 2001/5/25  |d c  |e dmitchel  |f 12:30:50 pm 
994 |a E0  |b TXA 
999 |a MARS 
999 f f |s 8d009984-1b19-3438-9b9d-0ba677b5ca35  |i 08b308f7-06e2-3635-b73e-c9d64750ebad  |t 0 
952 f f |p ric  |a Texas A&M University  |b Rellis Campus  |c Joint Library Facility  |s JLF  |d Remote Storage  |t 0  |e TK7874 .M5324 2000  |h Library of Congress classification  |i unmediated -- volume  |m A14827710160 
998 f f |a TK7874 .M5324 2000  |t 0  |l Remote Storage