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| LEADER |
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| 005 |
20151023053537.0 |
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|b .M5324 2000
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| 245 |
0 |
0 |
|a MOEMS and miniaturized systems :
|b 18-20 September 2000, Santa Clara, USA /
|c M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA).
|
| 246 |
3 |
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|a Microoptoelectromechanical systems and miniaturized systems
|
| 264 |
|
1 |
|a Bellingham, Wash., USA :
|b SPIE,
|c [2000]
|
| 264 |
|
4 |
|c ©2000
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| 300 |
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|a viii, 412 pages :
|b illustrations (some color) ;
|c 28 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a unmediated
|b n
|2 rdamedia
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| 338 |
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|a volume
|b nc
|2 rdacarrier
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| 490 |
1 |
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|a Proceedings / SPIE--the international society for optical engineering ;
|v v. 4178
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| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|v Congresses.
|
| 650 |
|
0 |
|a Miniature electronic equipment
|v Congresses.
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| 650 |
|
0 |
|a Micromechanics
|v Congresses.
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| 650 |
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0 |
|a Optical scanners
|v Congresses.
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| 700 |
1 |
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|a Motamedi, M. Edward.
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| 700 |
1 |
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|a Göring, Rolf.
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| 710 |
2 |
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|a Society of Photo-optical Instrumentation Engineers.
|
| 710 |
2 |
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|a Semiconductor Equipment and Materials International.
|
| 710 |
2 |
|
|a Solid State Technology (Organization)
|
| 710 |
2 |
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|a Sandia National Laboratories.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 4178.
|
| 948 |
|
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|a cataloged
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|c 2001/5/25
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|i unmediated -- volume
|m A14827710160
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