MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors:	Motamedi, M. Edward, Göring, Rolf
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [2000]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4178.
Subjects:	Microelectromechanical systems > Congresses. Miniature electronic equipment > Congresses. Micromechanics > Congresses. Optical scanners > Congresses.

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