Cover Image

MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors: Motamedi, M. Edward, Göring, Rolf
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4178.
Subjects:
Microelectromechanical systems > Congresses.
Miniature electronic equipment > Congresses.
Micromechanics > Congresses.
Optical scanners > Congresses.
Description
Physical Description:viii, 412 pages : illustrations (some color) ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819438340