APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories, Motamedi, M. E., & Göring, R. (2000). MOEMS and miniaturized systems: 18-20 September 2000, Santa Clara, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories, M. Edward Motamedi, and Rolf Göring. MOEMS and Miniaturized Systems: 18-20 September 2000, Santa Clara, USA. Bellingham, Wash., USA: SPIE, 2000.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. MOEMS and Miniaturized Systems: 18-20 September 2000, Santa Clara, USA. SPIE, 2000.