Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Kaiser, Winfried M., Stulen, R. H.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [2000]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4146.
Subjects:	Grenz rays > Congresses. Ultraviolet radiation > Industrial applications > Congresses. X-rays > Industrial applications > Congresses. X-ray optics > Congresses.

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