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Microfabricated systems and MEMS V : proceedings of the international symposium /

Bibliographic Details
Corporate Authors: International Symposium on Microfabricated Systems and MEMS Phoenix, Ariz., Electrochemical Society, Electrochemical Society. Sensor Division, Electrochemical Society. Dielectric Science & Technology, Electrochemical Society. Electronics Division
Other Authors: Hesketh, P. J. (Peter J.)
Format: Conference Proceeding Book
Language:English
Published: Pennington, NJ : Electrochemical Society, Inc., [2000]
Series:Proceedings (Electrochemical Society) ; v. 2000-19.
Subjects:
Microelectronics > Congresses.
Microstructure > Congresses.
Micromechanics > Congresses.
Description
Item Description:"Microfabricated Systems and MEMS-V Symposium held in Phoenix, October 2000"--Pref.
"Sensor, Dielectric Science & Technology, and Electronics Divisions."
Physical Description:viii, 258 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1566772869