Microfabricated systems and MEMS V : proceedings of the international symposium /

Bibliographic Details
Corporate Authors:	International Symposium on Microfabricated Systems and MEMS Phoenix, Ariz., Electrochemical Society, Electrochemical Society. Sensor Division, Electrochemical Society. Dielectric Science & Technology, Electrochemical Society. Electronics Division
Other Authors:	Hesketh, P. J. (Peter J.)
Format:	Conference Proceeding Book
Language:	English
Published:	Pennington, NJ : Electrochemical Society, Inc., [2000]
Series:	Proceedings (Electrochemical Society) ; v. 2000-19.
Subjects:	Microelectronics > Congresses. Microstructure > Congresses. Micromechanics > Congresses.

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