APA (7th ed.) Citation

International Symposium on Microfabricated Systems and MEMS Phoenix, Ariz, Electrochemical Society, Electrochemical Society. Sensor Division, Electrochemical Society. Dielectric Science & Technology, Electrochemical Society. Electronics Division, & Hesketh, P. J. (2000). Microfabricated systems and MEMS V: Proceedings of the international symposium. Electrochemical Society, Inc..

Chicago Style (17th ed.) Citation

International Symposium on Microfabricated Systems and MEMS Phoenix, Ariz, Electrochemical Society, Electrochemical Society. Sensor Division, Electrochemical Society. Dielectric Science & Technology, Electrochemical Society. Electronics Division, and P. J. Hesketh. Microfabricated Systems and MEMS V: Proceedings of the International Symposium. Pennington, NJ: Electrochemical Society, Inc., 2000.

MLA (9th ed.) Citation

International Symposium on Microfabricated Systems and MEMS Phoenix, Ariz, et al. Microfabricated Systems and MEMS V: Proceedings of the International Symposium. Electrochemical Society, Inc., 2000.