Handbook of VLSI microlithography : principles, technology, and applications /

Bibliographic Details
Other Authors:	Helbert, John N.
Format:	Book
Language:	English
Published:	Park Ridge, N.J. : Norwich, N.Y. : Noyes Publications ; William Andrew Pub., [2001]
Edition:	2nd ed.
Series:	Materials science and process technology series.
Subjects:	Integrated circuits > Very large scale integration. Microlithography.

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