Plasma processing XIII : proceedings of the International Symposium /

Bibliographic Details
Corporate Authors:	Symposium on Plasma Processing Toronto, Canada, Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division, Electrochemical Society. Meeting, International Symposium on Plasma Processing
Other Authors:	Mathad, G. S.
Format:	Conference Proceeding Book
Language:	English
Published:	Pennington, NJ : Electrochemical Society, [2000]
Series:	Proceedings (Electrochemical Society) ; 2000-6.
Subjects:	Semiconductors > Etching > Congresses. Plasma etching > Congresses.

Description
Item Description:	"Dielectric Science and Technology and Electronics Divisions." "This proceedings volume contains the papers presented at the thirteenth symposium on Plasma Processing ... held as part of the 197th meeting of the Electrochemical Society, Inc. in Toronto, Canada, May 14-19, 2000."--Preface.
Physical Description:	ix, 394 pages : illustrations ; 23 cm.
Bibliography:	Includes bibliographical references and indexes.
ISBN:	1566772710