Plasma processing XIII : proceedings of the International Symposium /

Bibliographic Details
Corporate Authors:	Symposium on Plasma Processing Toronto, Canada, Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division, Electrochemical Society. Meeting, International Symposium on Plasma Processing
Other Authors:	Mathad, G. S.
Format:	Conference Proceeding Book
Language:	English
Published:	Pennington, NJ : Electrochemical Society, [2000]
Series:	Proceedings (Electrochemical Society) ; 2000-6.
Subjects:	Semiconductors > Etching > Congresses. Plasma etching > Congresses.

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