Cover Image

Micromachining and microfabrication : 28-30 November 2000, Singapore /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Nanyang Technological University, Institute of Physics, Singapore
Other Authors: Chau, Kevin, Parameswaran, Ash M., Tay, Francis E. H.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4230.
Subjects:
Micromachining > Congresses.
Microfabrication > Congresses.
Microelectromechanical systems > Congresses.
Description
Physical Description:vii, 248 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819439029