Micromachining and microfabrication : 28-30 November 2000, Singapore /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Nanyang Technological University, Institute of Physics, Singapore
Other Authors:	Chau, Kevin, Parameswaran, Ash M., Tay, Francis E. H.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [2000]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4230.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Microelectromechanical systems > Congresses.

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