Society of Photo-optical Instrumentation Engineers, Nanyang Technological University, Institute of Physics, Singapore, Chau, K., Parameswaran, A. M., & Tay, F. E. H. (2000). Micromachining and microfabrication: 28-30 November 2000, Singapore. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, Nanyang Technological University, Singapore Institute of Physics, Kevin Chau, Ash M. Parameswaran, and Francis E. H. Tay. Micromachining and Microfabrication: 28-30 November 2000, Singapore. Bellingham, Wash., USA: SPIE, 2000.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. Micromachining and Microfabrication: 28-30 November 2000, Singapore. SPIE, 2000.
Warning: These citations may not always be 100% accurate.