Advanced microelectronic processing techniques : 28-30 November 2000, Singapore /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Nanyang Technological University, Institute of Physics, Singapore
Other Authors:	Harrison, H. B., 1930-, Wee, Andrew T. S., Gupta, Subhash, 1955-
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [2000]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4227.
Subjects:	Semiconductor wafers > Technological innovations > Congresses. Semiconductors > Characterization > Congresses. Optoelectronic devices > Technological innovations > Congresses. Epitaxy > Congresses. Microelectronics > Congresses.

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