Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Nanyang Technological University, Institute of Physics, Singapore
Other Authors:	Mack, Chris A., Yuan, Xiaocong
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [2000]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4226.
Subjects:	Microlithography > Industrial applications > Congresses. Integrated circuits > Design and construction > Congresses. Integrated circuits > Inspection > Congresses. Process control > Congresses.

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