Laser induced stress wave thermometry applied to silicon wafer processing /

The research presented in this work employs laser-based generation and detection of ultrasound in anisotropic plate structures. Ultrasound generation is achieved in the thermoelastic region by a Q-switched Nd:YAG laser. Acoustic detection is performed using a fiber-optic-based interferometric tech...

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Bibliographic Details

Main Author:	Rabroker, George Andrew, 1970-
Format:	Thesis eBook
Language:	English
Published:	[Place of publication not identified] : [publisher not identified] ; 2000.
Subjects:	Major mechanical engineering.
Online Access:	Link to OAKTrust copy