Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000 /

Bibliographic Details
Corporate Author:	International Conference on Characterization and Metrology for ULSI Technology
Other Authors:	Seiler, David G.
Format:	Conference Proceeding Book
Language:	English
Published:	Melville, NY : American Institute of Physics, 2001.
Series:	AIP conference proceedings ; no. 550.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software.

Description
Item Description:	"The 2000 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology (NIST) from June 26 through June 29, 2000."--Pref.
Physical Description:	xv, 708 pages : illustrations ; 28 cm. + 1 CD-ROM (4 3/4 in.)
Bibliography:	Includes bibliographical references and indexes.
ISBN:	156396967X (set) 1563969793 (CD-ROM)
ISSN:	0094-243x ;