Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000 /

Bibliographic Details
Corporate Author:	International Conference on Characterization and Metrology for ULSI Technology
Other Authors:	Seiler, David G.
Format:	Conference Proceeding Book
Language:	English
Published:	Melville, NY : American Institute of Physics, 2001.
Series:	AIP conference proceedings ; no. 550.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software.

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