Cover Image

Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A. /

Bibliographic Details
Other Authors: Clevenger, L. A.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2001]
Series:Materials Research Society symposia proceedings ; v. 611.
Subjects:
Integrated circuits, Ultra large scale integration > Materials > Congresses.
Silicides > Congresses.
Gate array circuits > Congresses.
Electric leakage > Congresses.
Description
Physical Description:1 volume (various pagings) : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558995196