Cover Image

Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A. /

Bibliographic Details
Other Authors: Clevenger, L. A.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2001]
Series:Materials Research Society symposia proceedings ; v. 611.
Subjects:
Integrated circuits, Ultra large scale integration > Materials > Congresses.
Silicides > Congresses.
Gate array circuits > Congresses.
Electric leakage > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TK7874.76 .G38 2001
 
Call Number Status Get It
TK7874.76 .G38 2001 Available