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Resolution enhancement techniques in optical lithography /

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Bibliographic Details
Main Author: Wong, Alfred Kwok-Kit
Format: Book
Language:English
Published: Bellingham, WA : SPIE Optical Engineering Press, [2001]
Series:Tutorial texts in optical engineering ; v. TT 47.
Subjects:
Integrated circuits > Design and construction.
Microlithography.

Evans: Library Stacks

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Call Number: TK7874 .W647 2001
 
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TK7874 .W647 2001 Available