Microstereolithography and other fabrication techniques for 3D MEMS /

Bibliographic Details
Main Author:	Varadan, V. K., 1943-
Other Authors:	Jiang, Xiaoning, Varadan, V. V., 1948-
Format:	Book
Language:	English
Published:	Chichester, England ; New York : John Wiley, [2001]
Subjects:	Microelectromechanical systems > Design and construction. Microlithography. Three-dimensional display systems.

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